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SEMI S2-0200E
ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR
SEMICONDUCTOR MANUFACTURING EQUIPMENT
This safety guideline was technically approved by the Global Environmental, Health, and Safety Committee
and is the direct responsibility of the North American Environmental, Health, and Safety Committee. Current
edition approved by the North American Regional Standards Committee on October 17, 1999 and December
15, 1999. Initially available on February 2000; to be published February 2000. Originally
published in 1991; previously published in 1993. NOTE: This document was entirely rewritten for
publication in 2000.
E This document was modified in November 2000 to correct various errata. Changes were made to Sections
9.7, 14.4.7, and 17.4.1, and Notes 39 and 60.
20. Automated Material Handlers
1 Purpose
21. Environmental Considerations
1.1 This safety guideline is intend ed as a set of
performance-based environmental, health, and safety 22. Exhaust Ventilation
(EHS) considerations for semiconductor manufacturing 23. Chemicals
equipment.
24. Ionizing Radiation
2 Scope
25. Non-Ionizing Radiation and Fields
2.1 Applicability — This guideline applies to 26. Lasers
equipment used to manufacture, measure, assemble,
and test semiconductor products. 27. Sound Pressure Level
2.2 Contents — This document co ntains the following 28. Related Documents
sections:
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