基于自适应陷波的直拉单晶直径跟踪.pdfVIP

学兔兔 第31卷 第7期 仪 器 仪 表 学 报 VoL 31 No．7 2010年7月 Chinese Journal of Scientific Instrument Ju1．2010 基于自适应陷波的直拉单晶直径跟踪术 梁炎明，刘 丁，任海鹏，赵 跃 (西安理工大学自动化与信息工程学院 西安 710048) 摘 要：为抵消单晶生长过程中晶体直径测量信号存在的周期性干扰，提出一种适合晶体直径测量信号的自适应陷波滤波方 法。该方法采用抵消低频分量、保留高频分量的思想建立滤波器优化函数，利用一种改进的粒子群优化算法优化该函数获得周 期性干扰的逼近信号，并用此逼近信号抵消周期性干扰。实验结果表明，所提出的滤波方法能有效跟踪直拉单晶直径的变化， 精度优于常用的滤波方法，所提出的粒子群优化算法能够使滤波器系数较快收敛。 关键词：直拉单晶；直径跟踪；周期性干扰；自适应陷波；粒子群优化 中图分类号：TPI4 TG232．5 文献标识码：A 国家标准学科分类代码：510．40 Diameter tracking in pulling of crystals based on adaptive notch filtering Liang Yanming，Liu Ding，Ren Haipeng，Zhao Yue (School ofAutomationInformation Engineering，Xihn University of Technology，Xihn 710048，China) Abstract：To offset the periodic interference on crystal diameter measurement in single crystal growth process，an adaptive notch filtering method suitable for crystal diameter measurement has been proposed in this paper．This method builds a filter optimization function through offsetting low frequency signal and maintaining high frequency signa1．The function is optimized using an improved PSO(particle swarm optimization)algorithm to obtain an ap— proximation signal close to the periodic interference，which can be used to offset the periodic interference on crystal diameter measurement in single crystal growth process．Experiments show that the filter method based on adaptive notch filtering can efficiently track crystal diameter variations in pulling of crystals and is better than commonly—used methods in calculation precision．These results also show that the proposed PSO algorithm can make the filter coeffi- cient converge to the glo