应用MEMS技术的振动感应传感器和结构健康监测.PDFVIP

富士时报　Vol.C4 No.1 2012 应用 MEMS 技术的振动感应传感器和结构健康监测 专 - Applied MEMS Micro vibration Sensors and Structural Health Monitoring 辑 坂上　　智 Satoru Sakaue 矢尾　博信 Hironobu Yao 铃木　　健 Takeshi Suzuki 日本阪神淡路大地震发生之后，针对地震的防灾意识和对建筑物安全性的关注不断高涨。作为计量设备的全新领域，富士 电机试制了应用MEMS（Micro Electro Mechanical Systems）技术的振动感应传感器。该振动感应传感器可计量0.1Gal 左右的常时微动，不仅可检测因地震等而导致的损坏，而且能够检测因经年劣化而导致的建筑物强度等特性的变化，能够应用 于包括常时微动计量在内的结构健康监测。此外，我们还在研究在电动机诊断等高频率、高加速度领域的应用。 After the Great Hanshin-Awaji Earthquake, interest has been increasing for earthquake disaster prevention awareness and building safety. As a new field of measuring devices, Fuji Electric has created a prototype vibration sensor module that applies MEMS (Micro Electro Mechanical Systems) technology. This vibration sensor is capable of continuous micro-vibration measurements of around 0.1 Gal. It can detect not only damage by earthquakes, but also the alteration of strength in a building caused by age-related deterioration, so it can be applied to structural health monitoring that includes continuous micro-vibration measurements. We are also considering applications in high-frequency/high-acceleration ranges for motor diagnostics. ⑸ 　前言 预测整体结构的状况和不良部位。图 1 为SHM的步骤示意 图。SHM通过设置于建筑结构体的传感器，测定建筑结构 1995年的阪神淡路大地震之后，针对地震的防灾意识 体的加速度（或者速度、位移等），将数据发送至管理服务器。 和对建筑物安全性的关注愈发高涨，近年来，进行建筑物 健全性、安全性诊断的结构健康监测（SHM：Structural Health Monitoring）的应用