真空蒸镀NdYAG薄膜的工艺研究.pdf

Material Sciences 材料科学, 2012, 2, 42-46 doi:10.4236/ms.2012.21007 Published Online January 2012 (/journal/ms) Study on the Process of Nd:Y Al O Thin Films by 3 5 12 Evaporation Deposition 1 1 1,2 1 Qun Zeng , Yongheng Zhou , Hao Ren , Songhao Liu 1Laboratory of Nanophotonic Functional Materials and Devices, School for Information and Optoelectronic Science and Engineering, South China Normal University, Guangzhou 2Guangzhou Research Institute of Optics-Mechanics-Electricity Technology, Guangzhou Email: qunzeng@ Received: Nov. 21st, 2011; revised: Dec. 19th, 2011; accepted: Dec. 23rd, 2011. Abstract: Nd:YAG thin films have been prepared by electron beam evaporation deposition in the study. The influences of different substrates, different coating materials and annealing temperatures on the structures of Nd:YAG thin films were investigated with XRD and SEM. Also, the optical properties of Nd:YAG thin films were characterized by spec- trophotometer. The Nd:YAG thin films deposited on Si from Nd:YAG powder blocks have single YAG crystal structure after annealing at 1100˚C. And the grains of the thin film are uniform and fine. In addition, the photoluminescence spectra of Nd:YAG thin films were measured at room temperature, and photoluminescence spectrum in the region of 1064 nm peak was detected. Keywords: Electron Beam Evaporation Deposition; Nd:YAG Thin Film 真空蒸镀Nd:YAG 薄膜的工艺研究 1 1 1,2 1 曾 群 ，周永恒 ，任