超硬材料薄膜涂层的研究进展及应用36730.pdfVIP

~ ~ 超硬材料薄膜涂层研究进展及应用 吕反修 ( 北京科技大学, 北京 100083) : CV D 和PV D T iN , T iC, T iCN , T iA lN 等硬质薄膜涂层材料已经在工具模具装饰等行业得到 益 广泛的应用, 但仍然不能满足许多难加工材料, 如高硅铝合金, 各种有色金属及其合金, 工程塑料, 非 金属材料, 陶瓷, 复合材料( 特别是金属基和陶瓷基复合材料) 等加工要求正是这种客观需求导致 了诸如金刚石膜立方氮化硼( c- BN) 和碳氮膜( CNx ) 以及纳米复合膜等新型超硬薄膜材料的研究 进展本文对这些超硬材料薄膜的研究现状及工业化应用前景进行了简要的介绍和评述 : 超硬材料薄膜; 研究进展; 工业化应用 :TB43 :A :1008-1690(2004)04-0001-006 Progresson Superhard Fil Coatings and TheirApplicalion L F an- xiu ( Depar men of Ma erials Science and Eng ineering , Universi y of Science and T echnolog y Beijing , Beijing 100083) Abstract:Such hard film coa ings as T iN , T iC, T iCN , T iA lN , e c. resul ed from CV D and PV D have been in creasingly ex ensively applied o such indus ries as ool, die, decora ion and so on, how ever, can no mee he needs of machining cer ain ma erials, such as high silicon aluminum alloy, various nonf errou s me als and alloy , en g ineering plas ics, nonme allic ma erials, ceram ics, composi e ma erials ( especially me al- and ceram ic- based com posi e m a erials) , e c. I is he needs ha have resul ed in progress of research on such new ype superhard films as diamond film , cubic boron ni ride( C- BN) and carboni ride f ilm( CNx ) , nano- composi e f ilms and so on. T he curren research si ua ion and comm ercial applica ion prospec of he above m en ioned superhard films have been in roduced and evalua eol in his paper . KeyWorks:superhard film ; research progress; comm ercial applica ion 1 C N , 3 4 40 GPa 10 GPa~ 50GP a, ( c- BN) , 50 ~ , , 100GPa( )